A micromachined nanopositioner with on-chip electrothermal actuation and sensing

- Zhu, Y., Bazaei, A., Moheimani, S. O. R., Yuce, M. R.

Ultrasonic energy transmission and conversion using a 2-D MEMS resonator

- Zhu, Y., Moheimani, S. O. R., Yuce, M. R.

Design, modeling, and control of a micromachined nanopositioner with integrated electrothermal actuation and sensing

- Zhu, Yong, Bazaei, Ali, Moheimani, S. O. Reza, Yuce, Mehmet Rasit

A 3-DOF SOI MEMS ultrasonic energy harvester for implanted devices

- Fowler, A. G., Moheimani, S. O. R., Behrens, S.

Design and characterization of a 2-DOF MEMS ultrasonic energy harvester with triangular electrostatic electrodes

- Fowler, Anthony G., Moheimani, S. O. Reza, Behrens, Sam

Control of a novel 2-DoF MEMS nanopositioner with electrothermal actuation and sensing

- Rakotondrabe, Micky, Fowler, Anthony G., Moheimani, S. O. Reza

A high-bandwidth MEMS nanopositioner for on-chip AFM: design, characterization, and control

- Maroufi, Mohammad, Bazaei, Ali, Moheimani, S. O. Reza

Instrumentation techniques for the control of MEMS nanopositioners

- Moore, Steven

On-chip dynamic mode atomic force microscopy: a silicon-on-insulator MEMS approach

- Ruppert, Michael G., Fowler, Anthony G., Maroufi, Mohammad, Moheimani, S. O. Reza

Multimodal atomic force microscopy with optimized higher eigenmode sensitivity using on-chip piezoelectric actuation and sensing

- Ruppert, Michael G., Moore, Steven I., Zawierta, Michal, Fleming, Andrew J., Putrino, Gino, Yong, Yuen K.

Active atomic force microscope cantilevers with integrated device layer piezoresistive sensors

- Ruppert, Michael G., Fleming, Andrew J., Yong, Yuen K.