4-DOF SOI-MEMS ultrasonic energy harvester
- Creator: Fowler, Anthony G. , Moheimani, S. O. Reza
- Resource Type: conference paper
- Date: 2016
A 2-DOF electrostatically actuated MEMS nanopositioner for on-chip AFM
- Creator: Fowler, A. G. , Laskovski, A. N. , Hammond, A. C. , Moheimani, S. O. R.
- Resource Type: journal article
- Date: 2012
A 4-DOF MEMS energy harvester using ultrasonic excitation
- Creator: Fowler, Anthony G. , Moheimani, S. O. Reza
- Resource Type: journal article
- Date: 2016
A comprehensive analysis of MEMS electrothermal displacement sensors
- Creator: Bazaei, Ali , Moheimani, S. O. Reza
- Resource Type: journal article
- Date: 2014
A feedback controlled MEMS nanopositioner for on-chip high-speed AFM
- Creator: Mohammadi, Ali , Fowler, Anthony G. , Yong, Yuen K. , Moheimani, S. O. Reza
- Resource Type: journal article
- Date: 2014
A low-flicker-noise MEMS electrothermal displacement sensing technique
- Creator: Mohammadi, A. , Yuce, M. R. , Moheimani, S. O. R.
- Resource Type: journal article
- Date: 2012
A MEMS electromagnetic energy harvester using ultrasonic excitation
- Creator: Fowler, Anthony G. , Moheimani, S. O. Reza , Behrens, Sam
- Resource Type: conference paper
- Date: 2013
A micromachined 2DOF nanopositioner with integrated capacitive displacement sensor
- Creator: Ji, Lujun , Zhu, Yong , Moheimani, S. O. Reza , Yuce, Mehmet Rasit
- Resource Type: conference paper
- Date: 2010
A pendulum-like structure for design of oscillators
- Creator: Chenniappan, Venkatesh , Moheimani, Reza , Yuce, Mehmet
- Resource Type: conference paper
- Date: 2009
Active cantilever with integrated actuation and sensing for use in off-resonance tapping AFM
- Creator: Franco Soares de Bem, Natã
- Resource Type: thesis
- Date: 2023
Closed-loop control of a novel 2-DOF MEMS nanopositioner with electrothermal actuation
- Creator: Fowler, Anthony G. , Rakotondrabe, Micky , Moheimani, S. O. Reza
- Resource Type: conference paper
- Date: 2013
Control of a MEMS nanopositioner for atomic force microscopy
- Creator: Yong, Y. K. , Fowler, A. G. , Mohammadi, A. , Moheimani, S. O. R.
- Resource Type: conference paper
- Date: 2013
Displacement measurement with a self-sensing MEMS electrostatic drive
- Creator: Moore, Steven I. , Moheimani, S. O. Reza
- Resource Type: journal article
- Date: 2014
High precision MEMS displacement sensors: device techniques and readout circuits
- Creator: Mohammadi, Ali
- Resource Type: thesis
- Date: 2014
MEMS nanopositioner for on-chip atomic force microscopy: a serial kinematic design
- Creator: Maroufi, Mohammad , Fowler, Anthony G. , Reza Moheimani, S. O.
- Resource Type: journal article
- Date: 2015
MEMS resonator with displacement sensor based on electro-thermal principles
- Creator: Moore, Steven , Moheimani, S. O. Reza
- Resource Type: conference paper
- Date: 2013
MEMS rotary microgripper with integrated electrothermal force sensor
- Creator: Piriyanont, Busara , Moheimani, S. O. Reza
- Resource Type: journal article
- Date: 2014
MEMS-based nanopositioning for on-chip high-speed scanning probe microscopy
- Creator: Maroufi, Mohammad
- Resource Type: thesis
- Date: 2015