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A 2-DOF MEMS ultrasonic energy harvester

A 2DOF SOI-MEMS nanopositioner with tilted flexure bulk piezoresistive displacement sensors

A 4-DOF MEMS energy harvester using ultrasonic excitation

A comprehensive analysis of MEMS electrothermal displacement sensors

Analysis of nonlinear phenomena in a thermal micro-actuator with a built-in thermal position sensor

Bidirectional electrothermal actuator with Z-shaped beams

Displacement sensing by piezoelectric transducers in high-speed lateral nanopositioning

Distributed Target Tracking Using Maximum Likelihood Kalman Filter with Non-Linear Measurements

Frequency modulation technique for MEMS resistive sensing

Multiple-vehicle localization using maximum likelihood Kalman filtering and ultra-wideband signals

Non-collocated displacement sensing by semiconductor strain gauges in differentially piezo-driven nanopositioners

Piezoelectric Bimorph Actuator With Integrated Strain Sensing Electrodes

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