Showing items 1 - 3 of 3

Your selections:

A 2DOF SOI-MEMS nanopositioner with tilted flexure bulk piezoresistive displacement sensors

- Maroufi, Mohammad, Moheimani, S. O. Reza

High-stroke silicon-on-insulator MEMS nanopositioner: control design for non-raster scan atomic force microscopy

- Maroufi, Mohammad, Fowler, Anthony G., Bazaei, Ali, Moheimani, S. O. Reza

Tilted beam piezoresistive displacement sensor: design, modeling, and characterization

- Maroufi, Mohammad, Bazaei, Ali, Mohammadi, Ali, Moheimani, S. O. Reza

  • 1
  • Disclaimer
  • Privacy
  • Copyright
  • Contact
  • Deposit