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ARC.DP0986319

4nanopositioning 3motion control 2actuator and sensor systems 2microsystems 2nanosystems 2noise 2position sensors 2resolution 1Piezoelectric actuators 1capacitors 1creep 1frequency control 1linearity 1metrology 1piezoeletric 1scanning probe microscopy 1transient response

3conference paper 2journal article

Date

42013 12014

Facets

4nanopositioning 3motion control 2actuator and sensor systems 2microsystems 2nanosystems 2noise 2position sensors 2resolution 1Piezoelectric actuators 1capacitors 1creep 1frequency control 1linearity 1metrology 1piezoeletric 1scanning probe microscopy 1transient response

3conference paper 2journal article

Date

42013 12014

Title
Creator
Date

Measuring and predicting resolution in nanopositioning systems

- Fleming, Andrew J.

Creator: Fleming, Andrew J.
Resource Type: journal article
Date: 2014

A review of nanometer resolution position sensors: operation and performance

- Fleming, Andrew J.

Creator: Fleming, Andrew J.
Resource Type: journal article
Date: 2013

Position sensor performance in nanometer resolution feedback systems

- Fleming, Andrew J.

Creator: Fleming, Andrew J.
Resource Type: conference paper
Date: 2013

Precision charge drive with low frequency voltage feedback for linearization of piezoelectric hysteresis

- Fleming, Andrew J.

Creator: Fleming, Andrew J.
Resource Type: conference paper
Date: 2013

Time domain resolution of nanopositioning systems

- Fleming, Andrew J.

Creator: Fleming, Andrew J.
Resource Type: conference paper
Date: 2013

1

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