A 3-DoF MEMS ultrasonic energy harvester
- Creator: Fowler, Anthony G. , Moheimani, S. O. Reza , Behrens, Sam
- Resource Type: conference paper
- Date: 2012
Characterization of a 2-DoF MEMS nanopositioner with integrated electrothermal actuation and sensing
- Creator: Rakotondrabe, Micky , Fowler, Anthony G. , Moheimani, S. O. Reza
- Resource Type: conference paper
- Date: 2012