Analysis of nonlinear phenomena in a thermal micro-actuator with a built-in thermal position sensor
- Creator: Bazaei, Ali , Zhu, Yong , Moheimani, Reza , Yuce, Mehmet Rasit
- Resource Type: journal article
- Date: 2012
Bidirectional electrothermal actuator with Z-shaped beams
- Creator: Zhu, Yong , Moheimani, S. O. Reza , Yuce, Mehmet Rasit
- Resource Type: journal article
- Date: 2012
A 2-DOF MEMS ultrasonic energy harvester
- Creator: Zhu, Yong , Moheimani, S. O. Reza , Yuce, Mehmet Rasit
- Resource Type: journal article
- Date: 2011
Design, modeling, and control of a micromachined nanopositioner with integrated electrothermal actuation and sensing
- Creator: Zhu, Yong , Bazaei, Ali , Moheimani, S. O. Reza , Yuce, Mehmet Rasit
- Resource Type: journal article
- Date: 2011
A MEMS nanopositioner with thermal actuator and on-chip thermal sensor
- Creator: Zhu, Yong , Moheimani, S. O. Reza , Yuce, Mehmet Rasit
- Resource Type: conference paper
- Date: 2010
A micromachined 2DOF nanopositioner with integrated capacitive displacement sensor
- Creator: Ji, Lujun , Zhu, Yong , Moheimani, S. O. Reza , Yuce, Mehmet Rasit
- Resource Type: conference paper
- Date: 2010