A Micro-Robotic Approach for The Correction of Angular Deviations in AFM Samples From Generic Topographic Data
- Creator: Leiro, Freddy Romero , Bazaei, Ali , Régnier, Stéphane , Boudaoud, Mokrane
- Resource Type: conference paper
- Date: 2022
Feedback Control Strategy for a High Speed Differential Piezo-Driven Stage by an Exclusive use of Piezoelectric Sensors
- Creator: Leiro, Freddy Romero , Bazaei, Ali , Regnier, Stephane , Boudaoud, Mokrane
- Resource Type: conference paper
- Date: 2022
Piezo displacement sensors for a compact high-speed x–y nanopositioner in differential actuation mode
- Creator: Bazaei, Ali , Boudaoud, Mokrane , Ettefagh, Massoud Hemmasian , Chen, Zhiyong , Regnier, Stephane
- Resource Type: journal article
- Date: 2022
Non-collocated displacement sensing by semiconductor strain gauges in differentially piezo-driven nanopositioners
- Creator: Bazaei, Ali , Boudaoud, Mokrane , Ettefagh, Massoud Hemmasian , Chen, Zhiyong , Regnier, Stephane
- Resource Type: journal article
- Date: 2021
Hysteresis in nanopositioning systems driven by dual-stack differential driving piezoelectric actuators
- Creator: Ettefagh, Massoud Hemmasian , Bazaei, Ali , Wang, Zhiyue , Chen, Zhiyong , Zhang, Hai-Tao , Regnier, Stephane , Boudaoud, Mokrane
- Resource Type: conference paper
- Date: 2020
Displacement sensing by piezoelectric transducers in high-speed lateral nanopositioning
- Creator: Bazaei, Ali , Boudaoud, Mokrane , Ettefagh, Massoud Hemmasian , Chen, Zhiyong , Regnier, Stephane
- Resource Type: journal article
- Date: 2019
In-Situ Semiconductor Position Sensor for Differentially Piezo-Driven Nanopositioners
- Creator: Bazaei, Ali , Boudaoud, Mokrane , Ettefagh, Massoud Hemmasian , Chen, Zhiyong , Regnier, Stephane
- Resource Type: conference paper
- Date: 2019