A self servo writing scheme for a MEMS storage device with sub-nanometer precision
- Sebastian, Abu, Pantazi, Angeliki, Moheimani, S. O. Reza, Pozidis, Haris, Eleftheriou, Evangelos
Achieving subnanometer precision in a MEMS-based storage device during self-servo write process
- Sebastian, Abu, Pantazi, Angeliki, Moheimani, S. O. Reza, Pozidis, Haris, Eleftheriou, Evangelos
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