- Title
- Simultaneous tip force and displacement sensing for AFM cantilevers with on-chip actuation: Design and characterization for off-resonance tapping mode
- Creator
- Bem, Nata F. S. de; Ruppert, Michael G.; Fleming, Andrew J.; Yong, Yuen K.
- Relation
- ARC.DP170101813 http://purl.org/au-research/grants/arc/DP170101813
- Relation
- Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers Vol. 338, Issue 1 May 2022, no. 113496
- Publisher Link
- http://dx.doi.org/10.1016/j.sna.2022.113496
- Publisher
- Elsevier
- Resource Type
- journal article
- Date
- 2022
- Description
- The use of integrated on-chip actuation simplifies the identification of a cantilever resonance, can improve imaging speed, and enables the use of smaller cantilevers, which is required for low-force imaging at high speed. This article describes a cantilever with on-chip actuation and novel dual-sensing capabilities for AFM. The dual-sensing configuration allows for tip displacement and tip force to be measured simultaneously. A mathematical model is developed and validated with finite element analysis. A physical prototype is presented, and its calibration and validation are presented. The cantilever is optimized for use in off-resonance tapping modes. Experimental results demonstrate an agreement between the on-chip sensors and external force and displacement measurements.
- Subject
- active cantilever; dual-sensing; atomic force microscopy; tip force
- Identifier
- http://hdl.handle.net/1959.13/1483040
- Identifier
- uon:51061
- Identifier
- ISSN:0924-4247
- Language
- eng
- Reviewed
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