- Title
- Dynamics and control of active microcantilevers
- Creator
- Ruppert, Michael G.; Moheimani, S. O.
- Relation
- Encyclopedia of Systems and Control p. 1-6
- Publisher Link
- http://dx.doi.org/10.1007/978-1-4471-5102-9_184-2
- Publisher
- Springer
- Resource Type
- book chapter
- Date
- 2020
- Description
- The microcantilever is a key precision mechatronic component of many technologies for characterization and manipulation of matter at the nanoscale, particularly in the atomic force microscope. When a cantilever is operated in a regime that requires the direct excitation and measurement of its resonance frequencies, appropriate instrumentation and control is crucial for high-performance operation. In this entry, we discuss integrated cantilever actuation and present the cantilever transfer function model and its properties. As a result of using these active cantilevers, the ability to control the quality factor in order to manipulate the cantilever tracking bandwidth is demonstrated.
- Subject
- atomic force microscopy; flexible structures; piezoelectric actuator and sensors; vibration control; Q control; negative imaginary systems
- Identifier
- http://hdl.handle.net/1959.13/1469520
- Identifier
- uon:48261
- Identifier
- ISBN:9781447151029
- Language
- eng
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