Dynamics and control of active microcantilevers

Title: Dynamics and control of active microcantilevers
Creator: Ruppert, Michael G.; Moheimani, S. O.
Relation: Encyclopedia of Systems and Control p. 1-6
Publisher Link: http://dx.doi.org/10.1007/978-1-4471-5102-9_184-2
Publisher: Springer
Resource Type: book chapter
Date: 2020
Description: The microcantilever is a key precision mechatronic component of many technologies for characterization and manipulation of matter at the nanoscale, particularly in the atomic force microscope. When a cantilever is operated in a regime that requires the direct excitation and measurement of its resonance frequencies, appropriate instrumentation and control is crucial for high-performance operation. In this entry, we discuss integrated cantilever actuation and present the cantilever transfer function model and its properties. As a result of using these active cantilevers, the ability to control the quality factor in order to manipulate the cantilever tracking bandwidth is demonstrated.
Subject: atomic force microscopy; flexible structures; piezoelectric actuator and sensors; vibration control; Q control; negative imaginary systems
Identifier: http://hdl.handle.net/1959.13/1469520
Identifier: uon:48261
Identifier: ISBN:9781447151029
Language: eng

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