- Title
- In-Situ Semiconductor Position Sensor for Differentially Piezo-Driven Nanopositioners
- Creator
- Bazaei, Ali; Boudaoud, Mokrane; Ettefagh, Massoud Hemmasian; Chen, Zhiyong; Regnier, Stephane
- Relation
- 2019 IEEE Sensors. Proceedings of 2019 IEEE Sensors (Montreal, Canada 27-30 October, 2019)
- Publisher Link
- http://dx.doi.org/10.1109/SENSORS43011.2019.8956836
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Resource Type
- conference paper
- Date
- 2019
- Description
- We address design, implementation, and characterization of semiconductor strain gauges as stage displacement sensors with small footprint for piezo-driven nanopositioners in differential actuation mode. The results indicate that in this actuation mode, a differential sensing strategy provides much better accuracy than the conventional non-differential schemes. The proposed differential sensor has a large sensitivity of kHz.4.4V/μm, 3σ-resolution of 2.4 nm, and bandwidth of 4 nm, and bandwidth of 4 kHz.
- Subject
- nanopositioning; sensors; semiconductor devices; piezo-driven nanopositioners
- Identifier
- http://hdl.handle.net/1959.13/1460323
- Identifier
- uon:45934
- Identifier
- ISBN:9781728116341
- Language
- eng
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