Combining spiral scanning and internal model control for sequential AFM imaging at video rate

Title: Combining spiral scanning and internal model control for sequential AFM imaging at video rate
Creator: Bazaei, Ali; Yong, Yuen Kuan; Moheimani, S. O. Reza
Relation: IEEE-ASME Transactions on Mechantronics Vol. 22, Issue 1, p. 371-380
Publisher Link: http://dx.doi.org/10.1109/TMECH.2016.2574892
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Resource Type: journal article
Date: 2017
Description: We report on the application of internal model control for accurate tracking of a spiral trajectory for atomic force microscopy (AFM). With a closed-loop bandwidth of only 300 Hz, we achieved tracking errors as low as 0.31% of the scan diameter and an ultravideo frame rate for a high pitch (30 nm) spiral trajectory generated by amplitude modulation of 3 kHz sinusoids. Design and synthesis procedures are proposed for a smooth modulating waveform to minimize the steady-state tracking error during sequential imaging. To obtain AFM images under the constant-force condition, a high bandwidth analogue proportional-integral controller is applied to the damped z-axis of a flexure nanopositioner. Efficacy of the proposed method was demonstrated by artifact-free images at a rate of 37.5 frames/s.
Subject: atomic force microscopy; imaging; internal model control; nanopositioning; spiral scan; video rate
Identifier: http://hdl.handle.net/1959.13/1385328
Identifier: uon:32204
Identifier: ISSN:1083-4435
Language: eng
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