- Title
- Design and control of a single-chip SOI-MEMS atomic force microscope
- Creator
- Maroufi, Mohammad; Ruppert, Michael G.; Fowler, Anthony G.; Moheimani, S. O. Reza
- Relation
- 2017 American Control Conference (ACC). Proceedings of the 2017 American Control Conference (ACC) (Seattle, WA 24-26 May, 2017) p. 2869-2874
- Publisher Link
- http://dx.doi.org/10.23919/ACC.2017.7963386
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Resource Type
- conference paper
- Date
- 2017
- Description
- This paper presents a novel microelectromechanical systems (MEMS) implementation of an on-chip atomic force microscope (AFM), fabricated using a silicon-on-insulator process. The device features an XY scanner with electrostatic actuators and electrothermal sensors, as well as an integrated silicon microcantilever. A single AlN piezoelectric electrode is used for simultaneous actuation and deflection sensing of the cantilever via a charge sensing technique. With the device being operated in closed loop, the probe scanner is successfully used to obtain 8μm×8μm tapping-mode AFM images of a calibration grating.
- Subject
- sensors; probes; electrostatic actuators; heat sinks; micromechanical devices; calibration; nanopositioning
- Identifier
- http://hdl.handle.net/1959.13/1348369
- Identifier
- uon:30198
- Identifier
- ISBN:9781509059928
- Rights
- © 2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
- Language
- eng
- Full Text
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