- Title
- Internal model control for spiral trajectory tracking with MEMS AFM scanners
- Creator
- Bazaei, Ali; Maroufi, Mohammad; Fowler, Anthony G.; Moheimani, S. O. Reza
- Relation
- ARC
- Relation
- IEEE Transactions on Control Systems Technology Vol. 24, Issue 5, p. 1717-1728
- Publisher Link
- http://dx.doi.org/10.1109/TCST.2015.2508979
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Resource Type
- journal article
- Date
- 2016
- Description
- We demonstrate the application of internal model control for accurate tracking of spiral scan trajectories, where the reference signals are orthogonal sinusoids whose amplitudes linearly vary with time. The plant is a 2-D microelectromechanical system nanopositioner equipped with in situ differential electrothermal sensors and electrostatic actuators. This device is used as the scanner stage in an atomic-force microscope. Additional internal model components are included in the controllers to compensate for the residual tracking errors due to plant nonlinearities. In a large scan range with a diameter of 16 µm, we achieved tracking of 1430-Hz spiral sinusoids, a frequency beyond the undamped fundamental resonance of the plant at 1340 Hz. This leads to a video-rate scan speed of 18 frames/s.
- Subject
- Atomic-force microscope (AFM) imaging; internal model control; microelectromechanical (MEMS) nanopositioner; spiral scan
- Identifier
- http://hdl.handle.net/1959.13/1347005
- Identifier
- uon:29972
- Identifier
- ISSN:1063-6536
- Language
- eng
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