- Title
- High sensitivity interferometer for on-axis detection of AFM cantilever deflection
- Creator
- Routley, Ben; Fleming, Andrew
- Relation
- International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS). Proceedings of the International Conference on Manipulation, Automation and Robotics at Small Scales (Paris, France 18-22 July, 2016)
- Relation
- ARC.DP120100487 & ARC.FT130100543 http://purl.org/au-research/grants/arc/FT130100543
- Publisher Link
- http://dx.doi.org/10.1109/MARSS.2016.7561714
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Resource Type
- conference paper
- Date
- 2016
- Description
- A homodyne path stabilised Michelson based interferometer displacement sensor was developed. This sensor achieved a noise floor of 100 fm/√vHz, for frequencies higher than 100 KHz. A prototype AFM that integrated this sensor was developed. Using tapping mode, topography maps of an AFM test grid were produced.
- Subject
- optical amplifiers; optical interferometry; optical sensors; collimators; mirrors; microscopy; electron tubes
- Identifier
- http://hdl.handle.net/1959.13/1340073
- Identifier
- uon:28394
- Identifier
- ISBN:9781509015108
- Language
- eng
- Reviewed
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