Tracking of spiral trajectories beyond scanner resonance frequency by a MEMS nanopositioner

Title: Tracking of spiral trajectories beyond scanner resonance frequency by a MEMS nanopositioner
Creator: Bazaei, Ali; Fowler, Anthony G.; Maroufi, Mohammad; Moheimani, S. O. Reza
Relation: 2015 IEEE Conference on Control Applications (CCA). Proceedings of the 2015 IEEE Conference on Control Applications (CCA) (Sydney 21-23 September, 2015) p. 1014-1019
Publisher Link: http://dx.doi.org/10.1109/CCA.2015.7320745
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Resource Type: conference paper
Date: 2015
Description: This paper presents a novel application of internal model control (IMC) for high-precision tracking of spiral reference signals generated by single-tone sine waves. In contrast to the existing spiral tracking control methods, the IMC approach provides zero steady-state tracking error for linear-time-invariant plants. An application of the proposed method is demonstrated with a two-axis microelectromechanical system (MEMS) stage that has a dominant resonance frequency of 1.3 kHz. Using a reference sinusoidal frequency of 1.4 kHz, the stage can scan a 16 μm-diameter area within 55ms with a root-mean-squared (rms) tracking error of 20nm.
Subject: microelectromechanical systems; internal model control; IMC; high precision tracking
Identifier: http://hdl.handle.net/1959.13/1330050
Identifier: uon:26296
Identifier: ISBN:9781479977871
Language: eng
Reviewed

		Thumbnail	File	Description	Size	Format