- Title
- High speed single- and dual-stage vertical positioners
- Creator
- Yong, Yuen K.; Wadikhaye, Sachin P.; Fleming, Andrew J.
- Relation
- ARC.DE130100879 & ARC. DP150103521
- Relation
- Review of Scientific Instruments Vol. 87, Issue 8
- Publisher Link
- http://dx.doi.org/10.1063/1.4960080
- Publisher
- AIP Publishing
- Resource Type
- journal article
- Date
- 2016
- Description
- This article presents a high-speed single- and dual-stage vertical positioners for applications in optical systems. Each positioner employs a unique end-constraint method with orthogonal flexures to preload a piezoelectric stack actuator. This end-constraint method also significantly increases the first mechanical resonance frequency. The single-stage positioner has a displacement range of 7.6 µm and a first resonance frequency of 46.8 kHz. The dual-stage design consists of a long-range slow-stage and a short-range fast-stage. An inertial counterbalance technique was implemented on the fast-stage to cancel inertial forces resulting from high-speed motion. The dual-stage positioner has a combined travel range of approximately 10 µm and a first evident resonance frequency of 130 kHz.
- Subject
- vertical positioners; optical systems; piezoelectric stack actuator
- Identifier
- http://hdl.handle.net/1959.13/1329249
- Identifier
- uon:26109
- Identifier
- ISSN:0034-6748
- Language
- eng
- Reviewed
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