- Title
- A 2-DOF electrostatically actuated MEMS nanopositioner for on-chip AFM
- Creator
- Fowler, A. G.; Laskovski, A. N.; Hammond, A. C.; Moheimani, S. O. R.
- Relation
- Journal of Microelectromechanical Systems Vol. 21, Issue 4, p. 771-773
- Publisher Link
- http://dx.doi.org/10.1109/JMEMS.2012.2191940
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Resource Type
- journal article
- Date
- 2012
- Description
- A new 2-DOF microelectromechanical systems (MEMS)-based parallel kinematic nanopositioner with electrostatic actuation is presented. The device has been designed, fabricated, and implemented using the silicon-on-insulator-based MEMSCAP SOIMUMPs process. Experimental characterization shows that in-plane displacements in excess of 15 μm are achievable and that the first resonant mode along each axis is located at approximately 820 Hz. The nanopositioner's use in a practical application is demonstrated, with the device being used as the scanning stage during an atomic force microscope scan.
- Subject
- atomic force microscopy; electrostatic actuators; microelectrochemical systems; MEMS; nanopositioning
- Identifier
- http://hdl.handle.net/1959.13/1316666
- Identifier
- uon:23241
- Identifier
- ISSN:1057-7157
- Language
- eng
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