Analysis of nonlinear phenomena in a thermal micro-actuator with a built-in thermal position sensor

Title: Analysis of nonlinear phenomena in a thermal micro-actuator with a built-in thermal position sensor
Creator: Bazaei, Ali; Zhu, Yong; Moheimani, Reza; Yuce, Mehmet Rasit
Relation: IEEE Sensors Journal Vol. 12, Issue 6, p. 1772-1784
Publisher Link: http://dx.doi.org/10.1109/JSEN.2011.2178236
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Resource Type: journal article
Date: 2012
Description: An analysis of nonlinear effects associated with a chevron thermal micro-actuator with a built in thermal position sensor under static conditions is presented in this paper. The nonlinearities present in both actuator and sensor are studied. The phenomena considered for the sensor include: thermal coupling from actuator to sensor and temperature dependence of electrical resistivity. Those considered for the actuator include: non-uniform spatial distribution of temperature in arms, temperature dependency of thermal expansion coefficient, deviation of arm shape from straight line due to physical constraints, and temperature dependence of electrical resistivity.
Subject: analytical models; electrothermal position microsensor; nonlinear analysis; thermoelectric microactuators
Identifier: http://hdl.handle.net/1959.13/1313278
Identifier: uon:22561
Identifier: ISSN:1530-437X
Language: eng
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