- Title
- Measuring and predicting resolution in nanopositioning systems
- Creator
- Fleming, Andrew J.
- Relation
- ARC.DP0986319
- Relation
- Mechatronics Vol. 24, Issue 6, p. 605-618
- Publisher Link
- http://dx.doi.org/10.1016/j.mechatronics.2013.10.003
- Publisher
- Pergamon Press
- Resource Type
- journal article
- Date
- 2014
- Description
- The resolution is a critical performance metric of precision mechatronic systems such as nanopositioners and atomic force microscopes. However, there is not presently a strict definition for the measurement or reporting of this parameter. This article defines resolution as the smallest distance between two non-overlapping position commands. Methods are presented for simulating and predicting resolution in both the time and frequency domains. In order to simplify resolution measurement, a new technique is proposed which allows the resolution to be estimated from a measurement of the closed-loop actuator voltage. Simulation and experimental results demonstrate the proposed techniques. The paper concludes by comparing the resolution benefits of new control schemes over standard output feedback techniques.
- Subject
- resolution; noise; nanopositioning; motion control; piezoeletric; scanning probe microscopy
- Identifier
- http://hdl.handle.net/1959.13/1307251
- Identifier
- uon:21374
- Identifier
- ISSN:0957-4158
- Language
- eng
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