Measuring and predicting resolution in nanopositioning systems

Title: Measuring and predicting resolution in nanopositioning systems
Creator: Fleming, Andrew J.
Relation: ARC.DP0986319
Relation: Mechatronics Vol. 24, Issue 6, p. 605-618
Publisher Link: http://dx.doi.org/10.1016/j.mechatronics.2013.10.003
Publisher: Pergamon Press
Resource Type: journal article
Date: 2014
Description: The resolution is a critical performance metric of precision mechatronic systems such as nanopositioners and atomic force microscopes. However, there is not presently a strict definition for the measurement or reporting of this parameter. This article defines resolution as the smallest distance between two non-overlapping position commands. Methods are presented for simulating and predicting resolution in both the time and frequency domains. In order to simplify resolution measurement, a new technique is proposed which allows the resolution to be estimated from a measurement of the closed-loop actuator voltage. Simulation and experimental results demonstrate the proposed techniques. The paper concludes by comparing the resolution benefits of new control schemes over standard output feedback techniques.
Subject: resolution; noise; nanopositioning; motion control; piezoeletric; scanning probe microscopy
Identifier: http://hdl.handle.net/1959.13/1307251
Identifier: uon:21374
Identifier: ISSN:0957-4158
Language: eng
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