Characterization of a 2-DoF MEMS nanopositioner with integrated electrothermal actuation and sensing

Title: Characterization of a 2-DoF MEMS nanopositioner with integrated electrothermal actuation and sensing
Creator: Rakotondrabe, Micky; Fowler, Anthony G.; Moheimani, S. O. Reza
Relation: IEEE Sensors 2012. Proceedings of the IEEE Sensors 2012 (Taipei, Taiwan 28-31 October, 2012)
Relation: ARC
Publisher Link: http://dx.doi.org/10.1109/ICSENS.2012.6411138
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Resource Type: conference paper
Date: 2012
Description: This paper reports a new 2-degree of freedom (DoF) microelectromechanical systems (MEMS) nanopositioner with actuation and sensing elements on the same chip. Novel features of this MEMS device include its 2-DoF (x-y axis) motion capability, the achievement of bi-directional movement (positive and negative displacement) along each axis thanks to the use of Z-shaped electrothermal actuators, and the measurement of x-y displacements by integrated electrothermal sensors positioned underneath the moving stage. The experimental characterization shows that displacements in excess of -5μm/+5μm and a response time of less than 300ms are achievable.
Subject: displacement measurement; microactuators; microsensors; nanopositioning; nanosensors
Identifier: http://hdl.handle.net/1959.13/1305494
Identifier: uon:21060
Identifier: ISBN:9781457717673
Language: eng
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