- Title
- Sensing bandwidth of electrothermal MEMS transducers in constant voltage and current modes
- Creator
- Bazaei, Ali; Mohammadi, Ali; Moheimani, S. O. Reza
- Relation
- 2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM). Proceedings of the 2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (Besancon, France 8-11 July, 2014) p. 1464-1468
- Relation
- ARC
- Publisher Link
- http://dx.doi.org/10.1109/AIM.2014.6878289
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Resource Type
- conference paper
- Date
- 2014
- Description
- This paper addresses effects of constant voltage and current biasing methods on sensing bandwidth of electrothermal displacement sensors in micro-electromechanical systems (MEMS). The dynamic response of the sensor is modeled based on first principles. The obtained model successfully captures a variety of nonlinear phenomena. Experiments are conducted to confirm the validity of the model and simulation results.
- Subject
- displacement measurement; electric current measurement; microfabrication; microsensors; transducers; voltage measurement
- Identifier
- http://hdl.handle.net/1959.13/1302352
- Identifier
- uon:20460
- Identifier
- ISBN:9781479957361
- Language
- eng
- Reviewed
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