- Title
- A review of nanometer resolution position sensors: operation and performance
- Creator
- Fleming, Andrew J.
- Relation
- ARC.DP0986319
- Relation
- Sensors and Actuators A: Physical Vol. 190, p. 106-126
- Publisher Link
- http://dx.doi.org/10.1016/j.sna.2012.10.016
- Publisher
- Elsevier BV
- Resource Type
- journal article
- Date
- 2013
- Description
- Position sensors with nanometer resolution are a key component of many precision imaging and fabrication machines. Since the sensor characteristics can define the linearity, resolution and speed of the machine, the sensor performance is a foremost consideration. The first goal of this article is to define concise performance metrics and to provide exact and approximate expressions for error sources including non-linearity, drift and noise. The second goal is to review current position sensor technologies and to compare their performance. The sensors considered include: resistive, piezoelectric and piezoresistive strain sensors; capacitive sensors; electrothermal sensors; eddy current sensors; linear variable displacement transformers; interferometers; and linear encoders.
- Subject
- position sensors; nanopositioning; resolution; linearity; noise; metrology
- Identifier
- http://hdl.handle.net/1959.13/1299479
- Identifier
- uon:19886
- Identifier
- ISSN:0924-4247
- Language
- eng
- Reviewed
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