MEMS rotary microgripper with integrated electrothermal force sensor

Title: MEMS rotary microgripper with integrated electrothermal force sensor
Creator: Piriyanont, Busara; Moheimani, S. O. Reza
Relation: Journal of Microelectromechanical Systems Vol. 23, Issue 6, p. 1249-1251
Publisher Link: http://dx.doi.org/10.1109/JMEMS.2014.2353034
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Resource Type: journal article
Date: 2014
Description: A microelectromechanical systems (MEMS) rotary microgripper incorporating electrothermal force sensors is reported. The device is fabricated using a standard SOI-MEMS process and achieves a stroke of (90 µm) at a relatively low voltage (<80 V). The electrothermal force sensor has a small footprint, is quite linear, and operates with a high accuracy. Being fabricated from biocompatible material (silicon) with sufficiently long gripping arms, the gripper can be used to manipulate living cells, tissues, and other biologically relevant samples. A pick-and-place experiment on a soft cell is conducted to verify performance of the proposed rotary microgripper.
Subject: MEMS; micro-gripper; electrothermal sensor; micromanipulation; single cell
Identifier: http://hdl.handle.net/1959.13/1299350
Identifier: uon:19853
Identifier: ISSN:1057-7157
Language: eng
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