- Title
- Control of a MEMS nanopositioner for atomic force microscopy
- Creator
- Yong, Y. K.; Fowler, A. G.; Mohammadi, A.; Moheimani, S. O. R.
- Relation
- 6th IFAC Symposium on Mechatronic Systems, 2013. Proceedings of the 6th IFAC Symposium on Mechatronic Systems (Hangzhou, China 10-12 April, 2013) p. 375-382
- Relation
- ARC
- Publisher Link
- http://dx.doi.org/10.3182/20130410-3-CN-2034.00038
- Publisher
- International Federation of Automatic Control (IFAC)
- Resource Type
- conference paper
- Date
- 2013
- Description
- A 2 DoF MEMS-based nanopositioner with integrated electrothermal sensors for on-chip AFM applications is presented. The electrothermal sensors consist of a pair of 50-µm long silicon heaters that operate in a differential mode. It is demonstrated in this work that the sensor measurements can be used in feedback control loops to improve the quality of AFM images during high-speed raster scanning. The x and y resonance frequencies of the MEMS-based nanopositioner appear at 815 Hz and 800 Hz respectively. To obtain high-speed AFM images, a positive position feedback (PPF) controller is designed to damp the resonant mode of the fast axis and an integrator is used to achieve satisfactory tracking. For the slow axis, a notch filter and an integrator are implemented to track a slow ramp signal. To further increase the tracking bandwidth of the fast axis, an inversion-based feedforward technique is combined with the PPF and integral feedback loops. With the proposed feedforward-feedback control strategy, high-quality AFM images up to 50 Hz line rate are obtained without noticeable vibration-induced artifacts.
- Subject
- feedforward; feedback; electrothermal sensor; MEMS; nanopositioning; AFM
- Identifier
- http://hdl.handle.net/1959.13/1297567
- Identifier
- uon:19482
- Identifier
- ISBN:9783902823311
- Language
- eng
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