- Title
- MEMS resonator with displacement sensor based on electro-thermal principles
- Creator
- Moore, Steven; Moheimani, S. O. Reza
- Relation
- 6th IFAC Symposium on Mechatronic Systems, 2013. Proceedings of the 6th IFAC Symposium on Mechatronic Systems (Hangzhou, China 10-12 April, 2013) p. 537-542
- Publisher Link
- http://dx.doi.org/10.3182/20130410-3-CN-2034.00116
- Publisher
- International Federation of Automatic Control (IFAC)
- Resource Type
- conference paper
- Date
- 2013
- Description
- This paper examines the feasibility of using displacement sensors based on electro-thermal principles in the design of resonators using MEMS technology. The use of this type of displacement sensor provides a new technology for low frequency resonator design. The theory and design of the displacement sensors are based on an existing body of work and show the displacement sensors have excellent resolution, small die footprint and a low operating voltage but have a high power consumption and low bandwidth. Two resonator designs, with a natural frequency of approximately 10 kHz, have been modeled and fabricated for experimentation. One is based on a microcantilever with parallel plate electrostatic actuators, while the other is based on fixed-guided micro-beams with comb electrostatic actuators. The electrical interface for the sensor output is a Wheatstone bridge. Both resonators are operated in air. The displacement sensors were able to capture the resonant motion of both resonators. The microcantilever based resonator had a quality factor of 195 and a resonance gain of -27 dB. The comb-drive based resonator had a quality factor of 440 and a resonance gain of -20 dB.
- Subject
- MEMS; displacement sensors; electro-thermal principles
- Identifier
- http://hdl.handle.net/1959.13/1297506
- Identifier
- uon:19464
- Identifier
- ISBN:9783902823311
- Language
- eng
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