- Title
- A serial-kinematic nanopositioner for high-speed atomic force microscopy
- Creator
- Wadikhaye, Sachin P.; Yong, Yuen Kuan; Reza Moheimani, S. O.
- Relation
- Review of Scientific Instruments Vol. 85, Issue 10, p. 105104-1-105104-10
- Publisher Link
- http://dx.doi.org/10.1063/1.4897483
- Publisher
- AIP Publishing
- Resource Type
- journal article
- Date
- 2014
- Description
- A flexure-guided serial-kinematic XYZ nanopositioner for high-speed Atomic Force Microscopy is presented in this paper. Two aspects influencing the performance of serial-kinematic nanopositioners are studied in this work. First, mass reduction by using tapered flexures is proposed to increased the natural frequency of the nanopositioner. 25% increase in the natural frequency is achieved due to reduced mass with tapered flexures. Second, a study of possible sensor positioning in a serial-kinematic nanopositioner is presented. An arrangement of sensors for exact estimation of cross-coupling is incorporated in the proposed design. A feedforward control strategy based on phaser approach is presented to mitigate the dynamics and nonlinearity in the system. Limitations in design approach and control strategy are discussed in the Conclusion.
- Subject
- position sensitive detectors; atomic force microscopy; piezoelectric devices; image sensors; movement sensors
- Identifier
- http://hdl.handle.net/1959.13/1293870
- Identifier
- uon:18688
- Identifier
- ISSN:0034-6748
- Language
- eng
- Full Text
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|---|---|---|---|---|---|---|---|
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