A feedback controlled MEMS nanopositioner for on-chip high-speed AFM

Title: A feedback controlled MEMS nanopositioner for on-chip high-speed AFM
Creator: Mohammadi, Ali; Fowler, Anthony G.; Yong, Yuen K.; Moheimani, S. O. Reza
Relation: ARC
Relation: IEEE Journal of Microelectromechanical Systems Vol. 23, Issue 3, p. 610-619
Publisher Link: http://dx.doi.org/10.1109/JMEMS.2013.2287506
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Resource Type: journal article
Date: 2014
Description: We report the design of a two-degree-of-freedom microelectromechanical systems nanopositioner for on-chip atomic force microscopy (AFM). The device is fabricated using a silicon-on-insulator-based process to function as the scanning stage of a miniaturized AFM. It is a highly resonant system with its lateral resonance frequency at ~850 Hz. The incorporated electrostatic actuators achieve a travel range of 16 μm in each direction. Lateral displacements of the scan table are measured using a pair of electrothermal position sensors. These sensors are used, together with a positive position feedback controller, in a feedback loop, to damp the highly resonant dynamics of the stage. The feedback controlled nanopositioner is used, successfully, to generate high-quality AFM images at scan rates as fast as 100 Hz.
Subject: nanopositioning; MEMS; electrothermal sensor; on-chip; AFM
Identifier: http://hdl.handle.net/1959.13/1067206
Identifier: uon:18341
Identifier: ISSN:1057-7157
Language: eng
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