- Title
- Time domain resolution of nanopositioning systems
- Creator
- Fleming, Andrew J.
- Relation
- 6th IFAC Symposum on Mechatronic Systems. Proceedings of the 6th IFAC Symposum on Mechatronic Systems (Hangzhou, China 10-12 April, 2013) p. 7-12
- Relation
- ARC.DP0986319
- Publisher Link
- http://dx.doi.org/10.3182/20130410-3-CN-2034.00011
- Publisher
- IFAC
- Resource Type
- conference paper
- Date
- 2013
- Description
- In this article, the resolution of a nanopositioning system is defined as the smallest distance between two non-overlapping points. Techniques are then described for estimating the closed-loop resolution from time-domain recordings of the contributing noise sources. Practical guidelines are also discussed to ensure statistically valid estimates. Experimental results show that the resolution of a piezoelectric tube nanopositioner is 2.1 nm with a closed-loop bandwidth of 100 Hz. This figure is identical to previous resolution estimates obtained using more involved frequency-domain measurements.
- Subject
- microsystems; nanosystems; motion control; actuator and sensor systems; nanopositioning
- Identifier
- http://hdl.handle.net/1959.13/1063039
- Identifier
- uon:17193
- Identifier
- ISBN:9783902823311
- Identifier
- ISSN:1474-6670
- Language
- eng
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