- Title
- A MEMS nanopositioner with thermal actuator and on-chip thermal sensor
- Creator
- Zhu, Yong; Moheimani, S. O. Reza; Yuce, Mehmet Rasit
- Relation
- 9th IEEE SENSORS Conference, 2010 (SENSORS 2010). Proceedings of the Ninth IEEE Sensors Conference 2010, SENSORS 2010 (Waikoloa, HI 1-4 November, 2010) p. 296-299
- Publisher Link
- http://dx.doi.org/10.1109/ICSENS.2010.5689877
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Resource Type
- conference paper
- Date
- 2010
- Description
- This paper describes the design of a micromachined nanopositioner with electrothermal actuation and sensing capabilities in a single silicon chip. The positioner has a dynamic range of 14.4 μm with a differential sensing scheme. At 6-V dc bias voltage, the position sensors have a power consumption of 120 mW, and a sensitivity of 0.27 mV/nm. The open-loop bandwidth is 101 Hz and the phase delay from 1 Hz to 51.2 kHz is 169°. The on-chip displacement sensing enables a feedback control capability.
- Subject
- elemental semiconductors; microactuators; micromachining; microsensors; nanosensors; silicon
- Identifier
- http://hdl.handle.net/1959.13/938604
- Identifier
- uon:12644
- Identifier
- ISBN:9781424481705
- Identifier
- ISSN:1930-0395
- Rights
- Copyright © 2010 IEEE. Reprinted from 2010 IEEE Sensors, p. 296-299. This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of University of Newcastle's products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org. By choosing to view this document, you agree to all provisions of the copyright laws protecting it.
- Language
- eng
- Full Text
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