- Title
- A compact XYZ scanner for fast atomic force microscopy in constant force contact mode
- Creator
- Yong, Yuen Kuan; Moheimani, S. O. Reza
- Relation
- 2010 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM 2010). Proceedings of the 2010 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (Montreal, Canada 6-9 July, 2010) p. 225-230
- Publisher Link
- http://dx.doi.org/10.1109/AIM.2010.5695880
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Resource Type
- conference paper
- Date
- 2010
- Description
- The design and characterization of a fast flexure-based, parallel-kinematics XYZ scanner for atomic force microscopy is presented in this article. The objective of the project is to design a AFM scanner with the ability to scan an image at high-speed and high resolution. Finite-element analysis was used to optimize the scanner's design in order to achieve high resonance frequencies. Experimental results show that the scanner has resonance frequencies of 10kHz at the X, Y and Z axes. To evaluate the performance of the scanner, it was installed into a NT-MDT microscope to obtain images. A 3.5μm×3.5μm image of a calibration grating was successfully recorded up to a scan speed of 625Hz in open-loop. Simulations show that the scanner can be operated up to 1025Hz with no oscillations observed in the fast axis. The scan rate can be further increased by means of feedback or feedforward control. The device outperforms commercial AFM scanners that typically work at scan frequencies below 20-30Hz.
- Subject
- atomic force microscopy; bending; design engineering; feedback; feedforward; finite element analysis; image resolution; image scanners; open loop systems; optical scanners
- Identifier
- http://hdl.handle.net/1959.13/933695
- Identifier
- uon:11695
- Identifier
- ISBN:9781424480302
- Rights
- Copyright © 2010 IEEE. Reprinted from the Proceedings of the 2010 IEEE/ASME International Conference on Advanced Intelligent Mechatronics. This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of the University of Newcastle's products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org. By choosing to view this document, you agree to all provisions of the copyright laws protecting it.
- Language
- eng
- Full Text
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