- Title
- Dual actuation for high speed atomic force microscopy
- Creator
- Kuiper, S.; Fleming, A. J.; Schitter, G.
- Relation
- 5th IFAC Symposium on Mechatronic Systems. Proceedings of the 5th IFAC Symposium on Mechatronic Systems (Cambridge, MA September 13-15, 2010) p. 220-226
- Publisher Link
- http://dx.doi.org/10.3182/20100913-3-US-2015.00105
- Publisher
- International Federation of Automatic Control (IFAC)
- Resource Type
- conference paper
- Date
- 2010
- Description
- In atomic force microscopy (AFM) the imaging speed is strongly limited by the bandwidth of the feedback loop that controls the interaction between the measurement tip and the sample. A significant increase in closed-loop bandwidth can be achieved by combining a long-range, low-bandwidth actuator with a short-range, high-bandwidth actuator, forming a dual actuated system. This contribution discusses the design of a model-based feedback controller that controls the tip-sample interaction in dual actuated AFM. In order to guarantee closed-loop stability, the dynamic uncertainties of the system are identified and taken into account in the controller design. Two different design cases are discussed, showing the trade-off between the positioning range at lower frequencies and the positioning range at higher frequencies. The designed feedback controller is implemented on the prototype AFM system and demonstrates a disturbance rejection bandwidth of 20 kHz.
- Subject
- atomic force microscopy; model-based control; piezoelectric actuator; dual actuation
- Identifier
- http://hdl.handle.net/1959.13/933525
- Identifier
- uon:11648
- Identifier
- ISBN:9783902661760
- Identifier
- ISSN:1474-3370
- Language
- eng
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