- Title
- Ultra-fast dual-stage vertical positioning for high performance SPMs
- Creator
- Fleming, Andrew J.; Kenton, Brian J.; Leang, Kam K.
- Relation
- 2010 American Control Conference (ACC 2010). Proceedings of the 2010 American Control Conference (Baltimore, MD 30 Jun - 2 Jul, 2010) p. 4975-4980
- Relation
- http://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=5530950
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Resource Type
- conference paper
- Date
- 2010
- Description
- major speed limitation of Scanning Probe Microscopes (SPMs) is the low vertical feedback bandwidth imposed by the mechanical scanner resonances. The vertical feedback controller regulates the tip-sample interaction in application modes such as constant-current scanning tunneling microscopy and constant-force atomic force microscopy. To increase the vertical feedback bandwidth, dual-stage actuators have been proposed to increase the first resonance frequency. In this work, an ultra-fast dual-stage vertical positioner and control system are described. The first resonance frequency of the dual-stage positioner is 88 kHz which permits a one hundred fold speed increase of a commercial AFM. The dualstage system is simple, low-cost and can be retrofitted to almost any commercial SPM.
- Subject
- actuators; feedback; microscopes; optical scanners; position control; resonance; scanning probe microscopy; velocity control
- Identifier
- http://hdl.handle.net/1959.13/933220
- Identifier
- uon:11575
- Identifier
- ISBN:9781424474264
- Language
- eng
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