- Title
- Nanopositioning system with force feedback for high-performance tracking and vibration control
- Creator
- Fleming, Andrew J.
- Relation
- IEEE-ASME Transactions on Mechatronics Vol. 15, Issue 3, p. 433-447
- Publisher Link
- http://dx.doi.org/10.1109/tmech.2009.2028422
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Resource Type
- journal article
- Date
- 2010
- Description
- In this study, the actuator load force of a nanopositioning stage is utilized as a feedback variable to achieve both tracking and damping. The transfer function from the applied actuator voltage to the measured load force exhibits a zero-pole ordering that greatly simplifies the design and implementation of a tracking and damping controller. Exceptional tracking and damping performance can be achieved with a simple integral controller. Other outstanding characteristics include guaranteed stability and insensitivity to changes in resonance frequency. Experimental results on a high-speed nanopositioner demonstrate an increase in the closed-loop bandwidth from 210 Hz (with an integral controller) to 2.07 kHz (with a force-feedback control). Gain margin is simultaneously improved from 5 dB to infinity.
- Subject
- mechatronics; piezoelectric transducers; position control; integral resonant control
- Identifier
- http://hdl.handle.net/1959.13/931552
- Identifier
- uon:11100
- Identifier
- ISSN:1083-4435
- Rights
- Copyright © 2010 IEEE. Reprinted from IEEE-ASME Transactions on Mechatronics Vol. 15, Issue 3, p. 433-447. This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of the University of Newcastle products's or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org. By choosing to view this document, you agree to all provisions of the copyright laws protecting it.
- Language
- eng
- Full Text
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