- Title
- Reducing cross-coupling in a compliant XY nanopositioner for fast and accurate raster scanning
- Creator
- Yong, Yuen Kuan; Liu, Kexiu; Moheimani, S. O. Reza
- Relation
- IEEE Transactions on Control Systems Technology Vol. 18, Issue 5, p. 1172-1179
- Publisher Link
- http://dx.doi.org/10.1109/TCST.2009.2033201
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Resource Type
- journal article
- Date
- 2010
- Description
- A compliant XY nanopositioner is presented in this brief. The device is designed to have a very low cross-coupling between the X- and Y-axis. Despite this, during high-speed raster scans, the cross-coupling effect can not be ignored. In this brief, a H∞ controller is designed and implemented to minimize the X-to-Y cross-coupling of the nanoscale positioning stage, particularly at its mechanical resonance frequencies. The controller is augmented with integral action to achieve accurate tracking, as well as sufficient damping. Raster scan results over an area of 10μm 10μm with small positioning errors are demonstrated. High-speed accurate raster scans of up to 100 Hz, with nanoscale resolution are also illustrated.
- Subject
- compliant XY nanopositioner; cross-coupling; H-infinity control; high-speed scans; raster scanning
- Identifier
- http://hdl.handle.net/1959.13/927864
- Identifier
- uon:10271
- Identifier
- ISSN:1063-6536
- Rights
- Copyright © 2010 IEEE. Reprinted from IEEE Transactions on Control Systems Technology Vol. 18, Issue 5, p. 1172-1179. This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of the University of Newcastle's products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org. By choosing to view this document, you agree to all provisions of the copyright laws protecting it.
- Language
- eng
- Full Text
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