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Moheimani, S. O. Reza

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Date: 2016
Language: eng
Resource Type: conference paper
Identifier: http://hdl.handle.net/1959.13/1316001
Description: A silicon-on-insulator microelectromechanical systems (MEMS)-based energy harvester potentially suitable for applications such as implanted biomedical systems is presented. Designed to be mechanically... More
Reviewed: Reviewed
Date: 2016
Language: eng
Resource Type: journal article
Identifier: http://hdl.handle.net/1959.13/1339112
Description: This paper presents a microelectromechanical systems (MEMS)-based energy harvester that is designed to harvest electrical energy from an external source of ultrasonic waves. The harvester features a n... More
Reviewed: Reviewed
Date: 2016
Language: eng
Resource Type: journal article
Identifier: http://hdl.handle.net/1959.13/1340203
Description: A fundamental challenge in dynamic mode atomic force microscopy (AFM) is the estimation of the cantilever oscillation amplitude from the deflection signal, which might be distorted by noise and/or hig... More
Reviewed: Reviewed
Date: 2016
Language: eng
Resource Type: conference paper
Identifier: http://hdl.handle.net/1959.13/1346919
Description: MEMS technology is being investigated to improve the performance, integration and cost of nanopositioning systems. The most basic MEMS fabrication processes produce designs etched into a single layer ... More
Reviewed: Reviewed
Date: 2016
Language: eng
Resource Type: conference paper
Identifier: http://hdl.handle.net/1959.13/1345329
Description: In this paper we study the origins of the cross coupling phenomenon in MEMS nanopositioners with a parallel kinematic mechanism. An analytical model is provided for a generic 2-DOF MEMS nanopositioner... More
Reviewed: Reviewed
Date: 2016
Language: eng
Resource Type: journal article
Identifier: http://hdl.handle.net/1959.13/1340202
Description: Emerging multifrequency atomic force microscopy (MF-AFM) methods rely on coherent demodulation of the cantilever deflection signal at multiple frequencies. These measurements are needed in order to cl... More
Reviewed: Reviewed
Date: 2016
Language: eng
Resource Type: journal article
Identifier: http://hdl.handle.net/1959.13/1346041
Description: Using standard microelectromechanical system (MEMS) processes to coat a microcantilever with a piezoelectric layer results in a versatile transducer with inherent self-sensing capabilities. For applic... More
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Date: 2016
Language: eng
Resource Type: journal article
Identifier: http://hdl.handle.net/1959.13/1320223
Description: Numerous dynamic atomic force micros- copy (AFM) methods have appeared in recent years, which make use of the excitation and detection of higher order eigenmodes of the microcantilever. The ability to... More
Reviewed: Reviewed
Date: 2016
Language: eng
Resource Type: journal article
Identifier: http://hdl.handle.net/1959.13/1319882
Description: We derive explicit solutions for a fixed-guided slender suspension beam that is initially straight and tilted with respect to the moving direction of its sliding end. The beam experiences substantial ... More
Reviewed: Reviewed
Date: 2015
Language: eng
Resource Type: journal article
Identifier: http://hdl.handle.net/1959.13/1331972
Description: We report the design, characterization, and control of a high-bandwidth microelectromechanical systems (MEMS) nanopositioner for on-chip atomic force microscopy (AFM). For the fabrication, a commercia... More
Reviewed: Reviewed
Date: 2015
Language: eng
Resource Type: journal article
Identifier: http://hdl.handle.net/1959.13/1319817
Description: A key hurdle to achieve video-rate atomic force microscopy (AFM) in constant-force contact mode is the inadequate bandwidth of the vertical feedback control loop. This paper describes techniques used ... More
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Date: 2015
Language: eng
Resource Type: conference paper
Identifier: http://hdl.handle.net/1959.13/1316939
Description: A 2 degree of freedom microelectromechanical system (MEMS) nanopositioner is presented in this paper. The nanopositioner is fabricated using a standard silicon-on-insulator process. The device demonst... More
Reviewed: Reviewed
Date: 2015
Language: eng
Resource Type: journal article
Identifier: http://hdl.handle.net/1959.13/1334619
Description: This paper presents a force-controlled microelectromechanical systems rotary microgripper with integrated electrothermal sensors. The proposed microgripper achieves a large displacement (85 ┬Ám) at low... More
Reviewed: Reviewed
Date: 2015
Language: eng
Resource Type: journal article
Identifier: http://hdl.handle.net/1959.13/1336077
Description: A 2-degree of freedom microelectromechanical systems nanopositioner designed for on-chip atomic force microscopy (AFM) is presented. The device is fabricated using a silicon-on-insulator-based process... More
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Date: 2015
Language: eng
Resource Type: conference paper
Identifier: http://hdl.handle.net/1959.13/1315541
Description: We report on a novel application of internal model control for accurate tracking of a high speed spiral trajectory in scanning probe microscopy. With a closed-loop bandwidth of only 1 kHz, we achieved... More
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