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| Title | Author/Creator | Date | Full Text | Reviewed | |
|---|---|---|---|---|---|
| A micromachined nanopositioner with on-chip electrothermal actuation and sensing | Zhu, Y.; Bazaei, A.; Moheimani, S. O. R.; Yuce, M. R. | 2010 | — | 
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| Ultrasonic energy transmission and conversion using a 2-D MEMS resonator | Zhu, Y.; Moheimani, S. O. R.; Yuce, M. R. | 2010 | — |
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| A 2-DOF wideband electrostatic transducer for energy harvesting and implantable applications | Zhu, Y.; Moheimani, S. O. R.; Yuce, M. R. | 2009 | — | ||
| A low-loss MEMS tunable capacitor with movable dielectric | Zhu, Y.; Yuce, M. R.; Moheimani, S. O. R. | 2009 | — |
Author/Creator
- Bazaei, A. (1)
Keyword
- microelectromechanical systems (MEMS) (2)
- Q factor (1)
- capacitors (1)
- electrostatic actuators (1)
- electrostatic devices (1)
- elemental semiconductors (1)
- energy converter (1)
- energy harvesting (1)
- feedback control (1)
- frequency response (1)
Resource Type
- conference paper (2)
- journal article (2)
