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| Title | Author/Creator | Date | Full Text | Reviewed | |
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| Achieving subnanometer precision in a MEMS-based storage device during self-servo write process | Sebastian, Abu; Pantazi, Angeliki; Moheimani, S. O. Reza; Pozidis, Haris; Eleftheriou, Evangelos | 2008 | 
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| A self servo writing scheme for a MEMS storage device with sub-nanometer precision | Sebastian, Abu; Pantazi, Angeliki; Moheimani, S. O. Reza; Pozidis, Haris; Eleftheriou, Evangelos | 2008 | — |
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Keyword
- H∞ controllers (1)
- identification and control methods (1)
- measurment and actuation (1)
- microsystems (1)
- microtechnology (1)
- nanopositioning (1)
- nanotechnology (1)
- precision positioning (1)
- probe-based data storage (1)
- resonant controllers (1)
Resource Type
- conference paper (1)
- journal article (1)
