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Please use this identifier to cite or link to this item: http://hdl.handle.net/1959.13/918727
- A low-loss MEMS tunable capacitor with movable dielectric
Yuce, M. R.;
Moheimani, S. O. R.
- The University of Newcastle. Faculty of Engineering & Built Environment, School of Electrical Engineering and Computer Science
- This paper reports a MEMS tunable capacitor with a new actuation principle. The new design adopts electrostatic actuation of an electrically floating movable dielectric. This enables us to achieve a high Q factor by eliminating the loss associated with springs in the RF signal path. Also, the design can achieve a high tuning range, by using additional actuation combs and thus eliminating the pull-in effect. Since no DC bias is applied on the plates of variable capacitor, the parallel plates 1/3 gap limitation does not apply. The designed devices were fabricated in a SOI MEMS process, with a 25 μm thick device layer and minimum gap of 2 μm. Measurement results show that the tunable capacitor has a 135 fF initial capacitance with a tuning range of 367% and a Q factor of 56 at 1 GHz by bi-directional actuation.
- 8th IEEE Conference on SENSORS (SENSORS 2009). Proceedings of the IEEE SENSORS 2009 Conference (Christchurch, New Zealand 25-28 October, 2009) p. 651-654
- Publisher Link
- Institute of Electrical and Electronics Engineers (IEEE)
- Resource Type
- conference paper
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