Please use this identifier to cite or link to this item: http://hdl.handle.net/1959.13/918650

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Title
A new robust damping and tracking controller for SPM positioning stages
Author/Creator
Fleming, Andrew J.;  Aphale, Sumeet S.;  Moheimani, S. O. Reza
Institution
The University of Newcastle. Faculty of Engineering & Built Environment, School of Electrical Engineering and Computer Science
Description
This paper demonstrates a simple second-order controller that eliminates scan-induced oscillation and provides integral tracking action. The controller can be retrofitted to any scanning probe microscope with position sensors by implementing a simple digital controller or op-amp circuit. The controller is demonstrated to improve the tracking bandwidth of an NT-MDT scanning probe microscope from 15 Hz (with an integral controller) to 490 Hz while simultaneously improving gain-margin from 2 dB to 7 dB. The penalty on sensor induced positioning noise is minimal. For the Scanning Probe Microscope considered in this paper, the noise is marginally increased from 0.30 nm RMS to 0.39 nm RMS. Open- and closed-loop experimental images of a calibration standard are reported at speeds of 1 and 10 lines per second (with a scanner resonance frequency of 290 Hz). Compared to traditional integral or PID controllers, the proposed controller provides a bandwidth improvement of approximately ten times. This allows faster imaging and less tracking lag at low speeds.
Relation
American Control Conference 2009 (ACC '09). Proceedings of the American Control Conference 2009 (St Louis, MO 10-12 June, 2009) p. 289-294
Publisher Link
http://dx.doi.org/10.1109/ACC.2009.5159934
Date
2009
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Keyword(s)
calibration standards;  digital controllers;  op-amp circuits;  positioning stages;  robust damping;  second-order controllers
Resource Type
conference paper
Rights
Copyright © 2009 IEEE. Reprinted from the Proceedings of the American Control Conference 2009. This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of University of Newcastle's products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org. By choosing to view this document, you agree to all provisions of the copyright laws protecting it.
Identifier
http://hdl.handle.net/1959.13/918650
Identifier
ISBN:9781424445240
Identifier
ISSN:0743-1619
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"A new robust damping and tracking controller for SPM positioning stages"
 
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