|Publisher version (open access)||772 KB||Adobe Acrobat PDF||View/Open
Please use this identifier to cite or link to this item: http://hdl.handle.net/1959.13/41081
- Design, identification, and control of a flexure-based XY stage for sast nanoscale positioning
Yong, Yuen Kuan;
Aphale, Sumeet S.;
Moheimani, S. O. Reza
- The design, identification, and control of a novel, flexure-based, piezoelectric stack-actuated XY nanopositioning stage are presented in this paper. The main goal of the design is to combine the ability to scan over a relatively large range (25x25ρm) with high scanning speed. Consequently, the stage is designed to have its first dominant mode at 2.7 kHz. Cross-coupling between the two axes is kept to -35dΒ ,low enough to utilize single-input--single-output control strategies for tracking. Finite-element analysis (FEA) is used during the design process to analyze the mechanical resonance frequencies, travel range, and cross-coupling between the X- and Y-axes of the stage. Nonlinearities such as hysteresis are present in such stages. These effects, which exist due to the use of piezoelectric stacks for actuation, are minimized using charge actuation. The integral resonant control method is applied in conjunction with feedforward inversion technique to achieve high-speed and accurate scanning performances, up to 400Ηz.
- IEEE Transactions on Nanotechnology Vol. 8, Issue 1, p. 46-54
- Publisher Link
- Institute of Electrical and Electronics Engineers (IEEE)
integral resonant control (IRC);
- Resource Type
- journal article
- Copyright © 2009 IEEE. Reprinted from IEEE Transactions on Nanotechnology. This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of the University of Newcastle's products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to email@example.com. By choosing to view this document, you agree to all provisions of the copyright laws protecting it.
- Full Text