Please use this identifier to cite or link to this item: http://hdl.handle.net/1959.13/26903
- Title
- Sensorless vibration suppression and scan compensation for piezoelectric tube nanopositioners
- Author/Creator
-
Fleming, Andrew J.;
Moheimani, S. O. Reza
- Description
- Piezoelectric tube scanners are employed in high-resolution positioning applications such as scanning probe microscopy and nanofabrication. Much research has proceeded with the aim of reducing hysteresis and vibration-the two foremost problems associated with piezoelectric tube scanners. In this paper, two simple techniques are proposed for simultaneously reducing hysteresis and vibration: 1) A new dc accurate charge amplifier is shown to significantly reduce hysteresis while avoiding characteristic voltage drift. 2) Piezoelectric shunt damping, a technique previously resident in the field of smart structures, has been applied to damp tube vibration. By attaching an LCR impedance to a single tube electrode, the first mechanical mode is reduced in magnitude by more than 20 dB.
- Relation
- IEEE Transactions on Control Systems Technology Vol. 14, Issue 1, p. 33-44
- Publisher Link
- http://dx.doi.org/10.1109/TCST.2005.860511
- Date
- 2006
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Keyword(s)
-
hysteresis;
shunt damping;
piezoelectric tube;
charge control;
scan compensation;
sensorless vibration suppression;
nanopositioning;
scanning probe microscope
- Resource Type
- journal article
- Rights
- Copyright © 2006 IEEE. Reprinted from IEEE Transactions on Control Systems Technology, 14, 1, 33-44. This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of the University of Newcastle's products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org. By choosing to view this document, you agree to all provisions of the copyright laws protecting it.
- Identifier
- http://hdl.handle.net/1959.13/26903
- Identifier
- ISSN:1558-0865
- Reviewed
- Full Text
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