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Please use this identifier to cite or link to this item: http://hdl.handle.net/1959.13/26903
- Sensorless vibration suppression and scan compensation for piezoelectric tube nanopositioners
Fleming, Andrew J.;
Moheimani, S. O. Reza
- Piezoelectric tube scanners are employed in high-resolution positioning applications such as scanning probe microscopy and nanofabrication. Much research has proceeded with the aim of reducing hysteresis and vibration-the two foremost problems associated with piezoelectric tube scanners. In this paper, two simple techniques are proposed for simultaneously reducing hysteresis and vibration: 1) A new dc accurate charge amplifier is shown to significantly reduce hysteresis while avoiding characteristic voltage drift. 2) Piezoelectric shunt damping, a technique previously resident in the field of smart structures, has been applied to damp tube vibration. By attaching an LCR impedance to a single tube electrode, the first mechanical mode is reduced in magnitude by more than 20 dB.
- IEEE Transactions on Control Systems Technology Vol. 14, Issue 1, p. 33-44
- Publisher Link
- Institute of Electrical and Electronics Engineers (IEEE)
sensorless vibration suppression;
scanning probe microscope
- Resource Type
- journal article
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