Please use this identifier to cite or link to this item: http://hdl.handle.net/1959.13/933889

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Title
High speed nanopositioning with force feedback
Author/Creator
Fleming, Andrew J.
Institution
The University of Newcastle. Faculty of Engineering & Built Environment, School of Electrical Engineering and Computer Science
Description
In this work a new method for feedback control of nanopositioning systems is proposed. A measurement of the force applied to the moving platform by the actuator is utilized as a feedback variable for both tracking and damping control. Excellent tracking and damping performance can be achieved with a simple integral controller. Other outstanding characteristics include guaranteed stability and insensitivity to changes in resonance frequency. Experimental results on a high-speed nanopositioner demonstrate an increase in closed-loop bandwidth from 210 Hz (with an integral controller) to 2.07 kHz (with force feedback control). Gain-margin is simultaneously improved from 5 dB to infinity.
Relation
2010 American Control Conference (ACC 2010). ‬Proceedings of the 2010 American Control Conference (Baltimore, MD 30 June - 2 July, 2010) p. 4969-4974
Relation
http://ieeexplore.ieee.org/xpl/articleDetails.jsp?reload=true&tp=&arnumber=5530939
Date
2010
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Keyword(s)
closed-loop bandwidth;  damping control;  damping performance;  feedback control;  integral controller;  nanopositioning systems;  resonance frequency
Resource Type
conference paper
Identifier
http://hdl.handle.net/1959.13/933889
Identifier
ISBN:9781424474264
Identifier
ISSN:0743-1619
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"High speed nanopositioning with force feedback"
 
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