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Please use this identifier to cite or link to this item: http://hdl.handle.net/1959.13/933907
- A 12-electrode piezoelectric tube scanner for fast atomic force microscopy
Yong, Yuen K.;
Moheimani, S. O. R.
- The University of Newcastle. Faculty of Engineering & Built Environment, School of Electrical Engineering and Computer Science
- This paper presents a 12-electrode piezoelectric tube scanner for fast atomic force microscopy (AFM). The scanner is used simultaneously as a sensor and an actuator. The built-in sensing mechanism of the scanner allows for displacement measurement and the unique arrangement of the electrodes allows the tube to be driven in an anti-symmetrical manner, resulting in a collocated system suitable for positive-position feedback (PPF). A PPF controller is designed to damp the scanner's resonance. The device is installed into an AFM to obtain open- and closed-loop images of a grating at 10Hz, 15.6Hz and 31Hz scan rates. The closed-loop images are noticeably superior to the open-loop images, showcasing the effectiveness of the proposed scanner.
- 2010 American Control Conference (ACC 2010). Proceedings of the 2010 American Control Conference (Baltimore, MD 30 June - 2 July, 2010) p. 4957-4962
- Institute of Electrical and Electronics Engineers (IEEE)
atomic force microscopy;
piezoelectric tube scanners;
- Resource Type
- conference paper
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