Please use this identifier to cite or link to this item: http://hdl.handle.net/1959.13/933512

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Title
High performance nanopositioning with integrated strain and force feedback
Author/Creator
Fleming, Andrew J.;  Leang, Kam K.
Institution
The University of Newcastle. Faculty of Engineering & Built Environment, School of Electrical Engineering and Computer Science
Description
This paper presents a new sensor arrangement and feedback controller for hysteresis, creep and vibration in piezoelectric actuators. A force and strain sensor is combined to provide both extremely low noise and high stability. The proposed technique is demonstrated on a nanopositioning platform with a range of 10 µm and a resonance frequency of 2.4 kHz. In closed-loop, the controller damps the resonance by 33 dB and provides a tracking bandwidth of 1.8 kHz. Excellent tracking of a 130 Hz triangular reference and reduction of hysteresis to 0.46% at 10 Hz is also demonstrated. Closed-loop positioning noise was approximately 0.67 nm peak-to-peak, or 0.0067% of the 10 µm range.
Relation
5th IFAC Symposium on Mechatronic Systems. Proceedings of the 5th IFAC Symposium on Mechatronic Systems (Cambridge, MA September 13-15, 2010) p. 117-124
Publisher Link
http://dx.doi.org/10.3182/20100913-3-US-2015.00128
Date
2010
Publisher
International Federation of Automatic Control (IFAC)
Keyword(s)
nanopositioning;  motion control;  hysteresis;  creep;  force feedback;  sensor fusion;  piezoelectric actuators;  position sensing
Resource Type
conference paper
Identifier
http://hdl.handle.net/1959.13/933512
Identifier
ISBN:9783902661760
Identifier
ISSN:1474-6670
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"High performance nanopositioning with integrated strain and force feedback"
 
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