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Please use this identifier to cite or link to this item: http://hdl.handle.net/1959.13/933327
- A micromachined 2DOF nanopositioner with integrated capacitive displacement sensor
Moheimani, S. O. Reza;
Yuce, Mehmet Rasit
- The University of Newcastle. Faculty of Engineering & Built Environment, School of Electrical Engineering and Computer Science
- This paper presents the design, fabrication and characterization of a micromachined two degrees-of-freedom (2DOF) nanopositioner. The proposed micro-electro-mechanical system (MEMS) stage, consisting of comb-drive actuators and on-chip capacitive displacement sensors in both X and Y directions, can simultaneously actuate the microstage and sense the corresponding displacements. A commercial capacitive readout IC (MS3110) is used for the open-loop capacitive sensing. The first resonance frequency of the stage is measured to be 4.24 kHz. The positioner has a dynamic range from −6.27 µm to +6.64 µm at an actuation voltage of 100 V.
- 9th IEEE SENSORS Conference, 2010 (SENSORS 2010). Proceedings of the Ninth IEEE Sensors Conference 2010, SENSORS 2010 (Kona, HI 1-4 November, 2010) p. 1464-1467
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- Institute of Electrical and Electronics Engineers (IEEE)
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- conference paper
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