Please use this identifier to cite or link to this item: http://hdl.handle.net/1959.13/933220

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Title
Ultra-fast dual-stage vertical positioning for high performance SPMs
Author/Creator
Fleming, Andrew J.;  Kenton, Brian J.;  Leang, Kam K.
Institution
The University of Newcastle. Faculty of Engineering & Built Environment, School of Electrical Engineering and Computer Science
Description
major speed limitation of Scanning Probe Microscopes (SPMs) is the low vertical feedback bandwidth imposed by the mechanical scanner resonances. The vertical feedback controller regulates the tip-sample interaction in application modes such as constant-current scanning tunneling microscopy and constant-force atomic force microscopy. To increase the vertical feedback bandwidth, dual-stage actuators have been proposed to increase the first resonance frequency. In this work, an ultra-fast dual-stage vertical positioner and control system are described. The first resonance frequency of the dual-stage positioner is 88 kHz which permits a one hundred fold speed increase of a commercial AFM. The dualstage system is simple, low-cost and can be retrofitted to almost any commercial SPM.
Relation
2010 American Control Conference (ACC 2010). Proceedings of the 2010 American Control Conference (Baltimore, MD 30 Jun - 2 Jul, 2010) p. 4975-4980
Relation
http://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=5530950
Date
2010
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Keyword(s)
actuators;  feedback;  microscopes;  optical scanners;  position control;  resonance;  scanning probe microscopy;  velocity control
Resource Type
conference paper
Identifier
http://hdl.handle.net/1959.13/933220
Identifier
ISBN:9781424474264
Reviewed
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Subject
"Ultra-fast dual-stage vertical positioning for high performance SPMs"
 
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